Binary Mask(即BIM,二元掩模)是半导体光刻工艺中应用最广泛的基础型掩模,由透光区(石英基板)与遮光区(铬层)构成明暗图形,可靠性高、通用性强。
其产品结构为石英基板(SiO2)、金属层(Cr)、光阻(PR,即光刻胶),是成熟制程的标准光掩模方案。

| Part Number | SMTC-BIM-I-6025 | |||
| Resist | Type | IP3500 | ||
Thickness (Å) | 4550~4750 Range≤100 | |||
| Metal Film | Thickness (Å) | 980 ~ 1080 | ||
光学密度 OD | 3.0 ± 0.1, λ = 450nm | |||
Reflectivity(%) | 12.5 ± 1,λ = 365nm | |||
| Substrate | Type | Quartz | ||
Dimension (mm) | 152.0 × 152.0,± 0.4 | |||
Thickness (mm) | 6.35± 0.1 | |||
Flatness (μm) | ≤ 1 / ≤ 2 | |||