芯链半导体生产的小尺寸IG-line Pellicle产品是为365nm I-line / 436nm G-line光刻系统设计的透明保护膜，作为半导体光刻关键配件，可有效阻隔尘埃与微颗粒（Particle）污染光掩模表面，其在高能量曝光环境下仍保持超穿透率与光学稳定性，保障光刻图形精度与制程良率。
| Type | Specifications | |||
IG-line | ||||
| Film | Material | Cellulose | ||
Transmittance （%） | ≥99.0 | |||
AR coated | Yes | |||
Uniformity of Transmittance（%） | ≤0.5 | |||
Particle | None (＞1.0μm) | |||
| Frame | Material | Anodized Aluminum | ||
Flatness（μm） | ≤80 | |||
| Adhesive | Material | Silicon Polymer | ||
| Case | Material | PET | ||
Process | Vacuum Forming | |||
| - | Information | Pellicle Frame Dimension | ||
| Inch | Shape | Dimension (mm) | Height (mm) | |
| 5” | Rectangle | 98(+0.00/-0.10) * 94(+0.00/-0.10) | 3.6(+0.00/-0.10) | |
Square | 97.5(+0.00/-0.10) * 97.5(+0.00/-0.10) | 5.8(+0.00/-0.10) | ||
Rectangle | 109(+0.00/-0.10) * 86(+0.00/-0.10) | 4.6(+0.00/-0.10) | ||
Rectangle | 110(+0.00/-0.10) * 107(+0.00/-0.10) | 3.75(+0.00/-0.10) | ||
Rectangle | 120(+0.00/-0.10) * 98(+0.00/-0.10) | 3.7(+0.00/-0.10) | ||
| 6” | Circle | Φ131(+0.00/-0.10) | 3.15(+0.00/-0.10) | |
Octagon | 147(+0.00/-0.10)*109(+0.00/-0.10) | 4.6(+0.00/-0.10) | ||
Octagon | 147(+0.00/-0.10)*120(+0.00/-0.10) | 4.6(+0.00/-0.10) | ||
Rectangle | 149(+0.00/-0.10)*113(+0.00/-0.10) | 4.6(+0.00/-0.10) | ||
Rectangle | 149(+0.00/-0.10)*118(+0.00/-0.10) | 5.8(+0.00/-0.10) | ||
Rectangle | 149(+0.00/-0.10)*122(+0.00/-0.10) | 4.6(+0.00/-0.10) | ||
Rectangle | 149(+0.00/-0.10)*122(+0.00/-0.10) | 5.8(+0.00/-0.10) | ||
| 7’’ | Octagon | 160(+0.00/-0.10)*160(+0.00/-0.10) | 5.8(+0.00/-0.10) | |
| … | 持续增加中 | |||
