ShinLans Pellicle 是光刻⼯艺专⽤⾼ 性能防护产品，专为保护光罩免受污 染⽽设计。产品核⼼薄膜层形成可靠 实体屏障，有效阻隔微尘与挥发性⽓ 体对光罩表⾯的侵蚀；同时针对多种 曝光波⻓进⾏专项优化，凭借超薄特 性最⼤限度降低曝光过程中的焦距偏 移与穿透率失真，为先进电路图形化 ⼯艺提供全⾯满⾜关键技术要求的防 护解决⽅案
| Type | Specifications | |||
KrF | ||||
| Film | Material | Fluoropolymer | ||
Transmittance （%） | ≥99.0 | |||
AR coated | No | |||
Uniformity of Transmittance（%） | ≤0.4 | |||
Particle | None (＞1.0μm) | |||
| Frame | Material | Anodized Aluminum | ||
Flatness (μm) | ≤50 | |||
| Adhesive | Material | Silicon Polymer | ||
| Case | Process | Injection Molding | ||
Material | ABS | |||
| Information | Pellicle Frame Dimension | |||
| Inch | Shape | Dimension (mm) | Height (mm) | |
| 5’’ | Rectangle | 109(+0.00/-0.10) * 86(+0.00/-0.10) | 4.6(+0.00/-0.10) | |
| 6” | Octagon | 147(+0.00/-0.10) * 109(+0.00/-0.10) | 4.6(+0.00/-0.10) | |
Octagon | 147(+0.00/-0.10) * 120(+0.00/-0.10) | 4.6(+0.00/-0.10) | ||
Rectangle | 149(+0.00/-0.10) * 113(+0.00/-0.10) | 4.6(+0.00/-0.10) | ||
Rectangle | 149(+0.00/-0.10) * 115(+0.00/-0.10) | 3.6(+0.00/-0.10) | ||
Rectangle | 149(+0.00/-0.10) * 115(+0.00/-0.10) | 4.6(+0.00/-0.10) | ||
Rectangle | 149(+0.00/-0.10) * 118(+0.00/-0.10) | 5.8(+0.00/-0.10) | ||
Rectangle | 149(+0.00/-0.10) * 122(+0.00/-0.10) | 4.6(+0.00/-0.10) | ||
Rectangle | 149(+0.00/-0.10) * 122(+0.00/-0.10) | 5.8(+0.00/-0.10) | ||
| … | 持续增加中 | |||
